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Optical-absorption edge and disorder effects in hydrogenated amorphous diamondlike carbon films

机译:氢化非晶类金刚石碳膜的光学吸收边缘和无序效应

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摘要

Optical absorption (~1–5 eV) in rf-deposited hydrogenated (20–40 at. %) amorphous “diamondlike” carbon films has been studied as a function of heat treatment. For E \u3e~ 2.5 eV a Tauc behavior is exhibited. Optical band gaps Eg are E0, the width of the tail, is quantitatively explained in terms of the annealing temperature TH. Increasing TH (\u3c700 \u3eK) reduces the hydrogen content, lowers Eg, and appears to harden the films. Eg is determined to be a linear function of E0. Additional analysis was performed in terms of a divergence temperature, T0; the results of this analysis are comparable to those observed in a-Si:H.
机译:已经研究了在射频下沉积的氢化(20–40 at。%)非晶“菱形”碳膜的光吸收(〜1-5 eV)与热处理的关系。对于E 2至2.5 eV,表现出Tauc行为。光学带隙Eg为E0,即尾部的宽度,根据退火温度TH定量地解释。增加TH(\ u3c700 \ u3eK)会降低氢含量,降低Eg并似乎使膜硬化。 Eg被确定为E0的线性函数。根据发散温度T0进行了其他分析;分析结果与a-Si:H中观察到的结果相当。

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